Compressed Air for Semiconductor Manufacturing

The “Invisible Assistant” in Semiconductor Manufacturing: Compressed Air

You may not realise that in the production of high-tech products like chips, compressed air acts as an “invisible assistant” – omnipresent and quietly performing a vital role. Now, let us explore why the semiconductor industry cannot function without compressed air, and what stringent requirements this sector imposes on air quality.

Where is compressed air used?

Wafer fabrication

Environmental Control: Compressed air maintains the constant temperature and humidity of the ‘cleanroom,’ ensuring wafers develop in a stable environment.

Surface Cleaning: Even a single speck of dust on a wafer surface can render a chip unusable. Compressed air acts as an ‘invisible dust gun,’ gently blowing away impurities to guarantee a spotless surface.

Lithography and Etching

Photoresist Coating: During photoresist application, compressed air ensures even distribution, creating a perfectly smooth, mirror-like coating.

Etching Residue Removal: After etching, compressed air performs the ‘clean-up operation,’ eliminating residues to guarantee precise, error-free patterns.

Thin Film Deposition

Pressure Stabilisation: Much like steaming buns requires steady steam pressure, thin film deposition relies on compressed air to maintain stable chamber pressure, ensuring each layer is uniformly consistent.

Ion Implantation and Packaging Testing

Pneumatic Control: Compressed air powers precision equipment, guaranteeing flawless execution at every operational stage.

Packaging Testing: During chip encapsulation, compressed air delivers high-pressure gas to verify seal integrity, preventing performance degradation from ‘air leaks’.

The Semiconductor Industry’s Demanding Requirements for Compressed Air

Semiconductor factories demand air purity comparable to that of an ICU ward:

Purity

Air must be virtually free of dust and particulates, as these can cause chip short-circuits or contamination. International standards mandate Class 0 purity – meaning ‘virtually zero contamination’.

Dryness

Air moisture must be minimal, with a dew point below -40°C to prevent condensation on wafers causing ‘water stain contamination’.

Oil Content

Oil content must be controlled below 0.01mg/m³, as even a single drop on a chip can impair performance or render it unusable.

How to Build a ‘Semiconductor-Grade’ Compressed Air System?

o meet these stringent requirements, semiconductor factories typically deploy a CDA (Clean Dry Air) system—functioning as an ‘air purification plant’ comprising:

Oil-free compressors: As oil-free compressors deliver pure air directly, they eliminate the need for secondary oil removal processes. Examples include elang’s oil-free water-lubricated air compressors and dry oil-free air compressors, which offer worry-free operation during production while completely preventing oil contamination.

Dryers: Semiconductor production environments demand not only dust-free conditions but also moisture-free compressed air. Compressed air treated by dryers resembles air drawn from a dry desert.

Multi-stage filters: Layered filtration capturing minute particles.

Air receivers: Stabilising pressure to handle production peaks.

Recommended Equipment: Oil-Free Compressors

When seeking a dependable compressed air solution for semiconductor factories, Elang oil-free compressors are your ideal choice:

100% Oil-Free: As previously mentioned, oil-free compressor technology eliminates oil contamination at source. For instance, Elang’s oil-free compressors ensure zero contact between compressed air and oil throughout both intake and discharge processes, meeting the semiconductor industry’s stringent clean air requirements.

Energy-efficient and high-performance: Elang’s market success and customer preference stem from its energy-saving air compressors. Through continuous technological innovation integrated into its products, it delivers not only round-the-clock continuous operation but also stands as a leader in energy efficiency within the air compressor sector.

Stable and Reliable: Given the requirement for round-the-clock continuous operation mentioned earlier, how could the product be anything but stable? Exceptional operational stability is one of the secrets behind elang products’ long service life and low failure rate. Consequently, elang oil-free compressors are ideally suited for critical semiconductor manufacturing processes such as lithography, etching, and thin-film deposition, providing complete assurance for sustained, stable production line operation.

Low maintenance costs: Oil-free construction reduces subsequent maintenance frequency, enhancing overall operational efficiency.

Whether for new facilities or equipment upgrades, Elang oil-free compressors deliver ‘clean, dry, and stable’ compressed air, enabling you to maintain composure throughout semiconductor manufacturing.